Studying of technology for outgassing rate measurement by the throughput method.
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Method for the Characterization of Extreme-Ultraviolet Photoresist Outgassing
Outgassing from photoresists illuminated by extreme ultraviolet radiation can lead to degradation of the very expensive multilayer-coated optics in an extreme ultraviolet stepper. Reliable quantification of the various organic molecules outgassed by photoresists has been a challenging goal. We have designed a compact system for this measurement. In the first step, the total number of molecules ...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1990
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.33.496